New Turbomolecular Pumping System From Varian, Inc. Delivers Portable, Dry, Ultra-high Vacuum.

Thursday, July 31, 2008 General News
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PALO ALTO, Calif., July 30 Varian, Inc.(NasdaqGS: VARI) announced today an addition to its line of turbomolecularpumping systems. The TPS-compact provides plug-and-play, hydrocarbon free,ultra-high vacuum pumping in both bench-top and mobile models backed by alight (max weight 19.1kg/42.1lbs.) scroll pump.

The portable, fully integrated turbo pumping system is powered by eitherthe Turbo-V 81 MacroTorr(TM) or Turbo-V 301 Navigator(TM) pumps, includingcontrol and communications software, and backed by the Varian IDP-3 Dry Scroll(60 L/min) primary pump. The ability to operate and read the InvertedMagnetron and Full Range gauges makes the TPS-compact the most cost-effectivedry turbo-pumping system for monitoring and managing the operating vacuumconditions. This feature also makes it ideal as a roughing pump for ionpumped Ultra-high vacuum systems.

The size and simplicity of the unit make clean, dry, ultra-high vacuumreadily accessible for users in applications from electron microscopy to highenergy physics. For example, the TPS-compact is ideal for maintaining vacuumin the column of an electron microscope during servicing or ensuring puritywhen evacuating load-lock chambers for semiconductor manufacturing.Additionally, the TPS-compact is the most suitable dry solution for fastpump-down of larger machine sections or beam lines where cleanliness isessential. The dry combination of a scroll pump and the turbo pump avoids anycontamination of the evacuated space during maintenance or operation. TheTPS-compact may be mounted in any position, making it suitable for most systemconfigurations.

The system is capable of pumping down small and medium volumes veryquickly and the scroll pump backing extends the life of the turbomolecularpump, reducing its power consumption by 30%. It can be serviced on-site bycustomers and is designed to be accessed easily for service. In addition togauge pressure, the large display also indicates when tip-seal replacement isneeded, preventing damage to the full system and especially the turbomolecularpump.

"Varian is the only company that offers a fully dry, compact turbo pumpingsystem with all the advantages of having a scroll rather than a diaphragmbacking pump," said Sergio Piras, Senior Vice President, Vacuum Technologies,Varian, Inc. "The TPS family gives our customers the most flexible andcomplete choices to meet their vacuum requirements."

For more technical information about Varian products, please visit

Varian, Inc. is a leading worldwide supplier of scientific instruments andvacuum technologies for life science and industrial applications. The companyprovides complete solutions, including instruments, vacuum products,laboratory consumable supplies, software, training and support through itsglobal distribution and support systems. Varian, Inc. employs approximately4,000 people worldwide and operates manufacturing facilities in North America,Europe and Asia Pacific. Varian, Inc. had fiscal year 2007 sales of $921million, and its common stock is traded on the NASDAQ Global Select Marketunder the symbol, "VARI." Further information is available on the company'sWeb site: More Information, Contact: Public Relations Varian, Inc. 650.424.3845

SOURCE Varian, Inc.

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